Lobster series 185Z340D-T2X0-C wafer transfer robots is a two-armed wafer transfer robot with a rate payload of 2kg. Equipped with a high-tech wafer transfer system, it has extremely high accuracy, flexibility and safety.

Features of Lobster185Z340D-T2X0-C Wafer Transfer Robot

Two-armed; payload is 2kg;

4-degrees-of-freedom;

Repositioning accuracy reaches ±0.1mm;

Cleanliness reaches Class100.

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