Silicon Susceptor

The silicon carbide susceptor is utilized in semiconductor CVD and PVD machines to provide support for wafers during high-temperature processes, ensuring stability and preventing any potential damage caused by nitrogen flow or accidental dropping.

Additionally, it can also be utilized as a wafer carrier in semiconductor etching equipment.

Features of DSTC SIC Susceptor

1

The minimum thickness reaches 1mm; High purity; Recyclable and reusable.

2

Self-developed cleaning technology, the surface metal ion residue meets the requirements of silicon wafer treatment process.

3

Mature processing process.

Silicon Susceptor Gallery

The Silicon Susceptor is utilized for transporting the wafer.

As one of silicon carbide semiconductor manufacturers, we will do our best to meet all the needs of customers.